Silicon Wafer Alignment

Silicon Wafer Alignment

What is the lens selected for silicon wafer alignment prior to measurement in the film thickness measurement system?

●Installed Product

Case Study Digest

Challenges/Issues VS-THV-SWIR Evaluation

・In order to see the backside of the wafer, our customer was attempting to use infrared light instead of visible light to transmit the light through the wafer for imaging.
・The brightness was not sufficient to speed up the inspection with conventional lens.

・The use of THV-SWIR solved the problem by making the lens 4 times brighter than conventional telecentric lenses.

Challenges/Issues

・In order to see the backside of the wafer, our customer was attempting to use infrared light instead of visible light to transmit the light through the wafer for imaging.
・The brightness was not sufficient to speed up the inspection with conventional lens.

VS-THV-SWIR Evaluation

・The use of THV-SWIR solved the problem by making the lens 4 times brighter than conventional telecentric lenses.

About the VS-THV-SWIR series selected to solve the issue in the case study.
About the VS-THV-SWIR series selected to solve the issue in the case study.

See What is Hidden
Telecentric Lenses for 1000nm ~ 1600nm SWIR

・SWIR optimized coaxial light input port
・1.1” & 1” support             
・Optical mag. 1.0x/1.5x/2.0x/3.0x/4.0x, 5 models
・Co-axial lighting

About the VS-THV-SWIR series selected to solve the issue in the case study.

See What is Hidden
Telecentric Lenses for 1000nm ~ 1600nm SWIR

・SWIR optimized coaxial light input port
・1.1” & 1” support             
・Optical mag. 1.0x/1.5x/2.0x/3.0x/4.0x, 5 models
・Co-axial lighting

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